Bid Success: $15.4 Million Lithography Machine Achieves Sub-110nm Resolution, Paving the Way for Future Technology Advancements

Shanghai Microelectronics Secures Bid for Lithography Machines: What You Need to Know

Summary

  • Winning Bid: Shanghai Microelectronics wins a contract for a stepper scanning lithography machine valued at approximately 109.9 million yuan.
  • Model Specifics: The SSC800 model is confirmed to feature a resolution of 110nm, not the previously speculated 28nm.
  • Industry Implications: While the acquisition marks progress, it is not the breakthrough achievement that many had anticipated within the competitive landscape of lithography technology.

On December 25, 2023, Shanghai Microelectronics gained considerable attention following the announcement of their successful bid for a stepper scanning lithography machine. This procurement, facilitated by the Ministry of Science and Technology, has sparked significant interest in the domestic lithography machine development landscape, as any advancements in this sector are closely monitored by industry professionals and enthusiasts alike.

Procurement Details

The procurement announcement, logged under the reference number zycgr22011903, indicated that the stepper scanning lithography machine was acquired from a single source, with the total bid amount reaching roughly 109.9 million yuan. The specific model awarded to Shanghai Microelectronics is named SSC800/10.

At the time of reporting, while the winning bid announcement was still accessible, detailed information regarding the machine appeared to be unavailable, raising questions about potential next steps in technology deployment.

Understanding the SSC800 Model

The SSC800 model had not been officially detailed in previous communications, leading to some confusion among netizens. Many recall discussions surrounding the SSA800 model from two years ago, which was rumored to be a 28nm lithography machine. Initial impressions suggest that the SSC800 might utilize similar technology; however, accuracy in these claims remains debatable.

Experts clarify that the SSC800’s specifications indicate a resolution of 110nm, with an overlay accuracy of 15nm—contrary to earlier assertions suggesting a 28nm capability. This clarity is critical for industry stakeholders who must navigate the complexities of lithography technology.

Comparison with Industry Standards

In September 2024, the Ministry of Industry and Information Technology introduced the "Guidance Catalog for the Promotion and Application of the First (Set) Major Technical Equipment (2024 Edition)," outlining the specifications for various lithography machines. According to this catalog, two types of argon fluoride lithography machines are noted:

  • Immersion Model: Offers a resolution of ≤65nm with an overlay accuracy ≤8nm.
  • Dry Model: Features a resolution of ≤110nm and an overlay accuracy ≤25nm.

Given its specifications, it is likely that the SSC800 is classified as a dry lithography machine. This categorization suggests it is less advanced than some of the more powerful models anticipated by industry experts.

Conclusion

Although Shanghai Microelectronics’ acquisition of the SSC800 lithography machine is a noteworthy achievement, it highlights the ongoing challenges and limitations within the lithography sector. While the company has made strides in securing contracts, the resolution and overlay capabilities of their latest offering do not match the high-performance standards set by more advanced technologies.

As the industry continues to evolve, stakeholders will be keenly watching for further developments that could signify deeper advancements in lithography capabilities, potentially impacting both domestic and global semiconductor markets.

In summary, while this acquisition represents an essential step forward in the domestic lithography landscape, it also underscores the existing technological hurdles that professionals in the field continue to face.


Editor’s Note: Continuous advancements in lithography technology will remain pivotal for the semiconductor industry. Stakeholders are encouraged to monitor further developments and adapt to the evolving landscape.

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